Primary accelerometer calibration with two-axis automatic positioning stage

In this study, we developed an automated, multipoint primary accelerometer calibration system using a two-axis positioning stage and heterodyne laser interferometer. The proposed offers low-cost, convenient, automated calibration, enabling less lead time. also better repeatability of 1μm, which is impossible through manual alignments. We measured the surface deformation reflection adaptor for single-ended by measuring more than 450 measurement positions. Visualizing surfaces facilitates understanding effects or non-linear motion, are among most significant uncertainty components in high-frequency calibrations.